Microactuated micro-XYZ stages for free-space micro-optical bench

Lin, L.Y.L.Y.LinShen, J.L.J.L.ShenLee, S.S.S.S.LeeSu, G.D.G.D.SuWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-101997http://www.scopus.com/inward/record.url?eid=2-s2.0-0030672632&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/331979Microactuated micro-XYZ stages for free-space micro-optical benchconference paper