In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor

Lee, Chi-YuanChi-YuanLeeCheng, Ying-ChouYing-ChouChengWu, Tsung-TsongTsung-TsongWuChen, Yung-YuYung-YuChenChen, Wen-JongWen-JongChenPao, Shih-YungShih-YungPaoChang, Pei-ZenPei-ZenChangChen, Ping-HeiPing-HeiChen2008-10-282018-06-282008-10-282018-06-282004http://ntur.lib.ntu.edu.tw//handle/246246/85706en-USIn-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensorjournal article