Differing morphologies of textured diamond films with electrical properties made with microwave plasma chemical vapor deposition

Lai, Wen ChiWen ChiLaiWu, Yu-ShiangYu-ShiangWuChang, Hou-ChengHou-ChengChangLee, Yuan-HaunYuan-HaunLee2012-10-242018-06-282012-10-242018-06-282010http://ntur.lib.ntu.edu.tw//handle/246246/243821en-USDiffering morphologies of textured diamond films with electrical properties made with microwave plasma chemical vapor depositionjournal article10.1016/j.apsusc.2010.09.006http://ntur.lib.ntu.edu.tw/bitstream/246246/243821/-1/264.pdf