A micro-machined cantilever PSA sensor with digital wireless interface

Chou, H.-T.H.-T.ChouHwang, R.-Z.R.-Z.HwangHung, C.-M.C.-M.HungTseng, C.-W.C.-W.TsengHuang, L.-S.L.-S.HuangSHEY-SHI LU2018-09-102018-09-102006http://www.scopus.com/inward/record.url?eid=2-s2.0-44949179823&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/324112A micro-machined cantilever PSA sensor with digital wireless interfaceconference paper10.1109/APMC.2006.4429718