Improvement in Radiation Hardness of Reoxidized Nitrided Oxide (RNO) in the Absence of Post-Oxidation Anneal

JENN-GWO HWU2018-09-102018-09-101993http://www.scopus.com/inward/record.url?eid=2-s2.0-0027282851&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/301817Improvement in Radiation Hardness of Reoxidized Nitrided Oxide (RNO) in the Absence of Post-Oxidation Annealjournal article10.1109/55.215081