臺灣大學: 光電工程學研究所楊志忠鍾育龍Chung, Yu-LungYu-LungChung2013-03-272018-07-052013-03-272018-07-052012http://ntur.lib.ntu.edu.tw//handle/246246/253437為瞭解表面電漿子與量子井耦合以提升發光二極體效率之物理機制，我們首先在氮化銦鎵/氮化鎵量子井結構上，使用奈米壓印微影技術製作週期性之銀奈米顆粒。以此技術，我們可以製作出侷域表面電漿子共振波長與量子井發光波段吻合的銀奈米顆粒。經由銀奈米顆粒所產生的侷域表面電漿子與量子井的耦合，我們觀察到量子井的發光波長因為耦合現象產生的波長變化，同時也量測到增強量子井光致螢光的發光強度，此外，也看到提升其內部量子效率。由於製作成發光二極體時需要保護銀奈米顆粒，但在其上成長二氧化矽覆蓋層將導致侷域表面電漿子共振波長紅移，若要使侷域表面電漿子共振波長與量子井發光波段吻合，我們需要將銀奈米顆粒變小。 另外，我們也利用奈米壓印微影技術及聚苯乙烯奈米球微影技術製作週期性排列和無週期性排列分佈之銀奈米圓盤，藉由反射頻譜量測，我們可得知當銀奈米圓盤厚度增加使得表面電漿子的共振波長紅移。而且週期性排列和無週期性排列分佈之銀奈米圓盤的反射頻譜特性上的差異也可以用來探討週期性排列奈米金屬圓盤結構所產生的耦合現象，無週期性排列分佈之銀奈米圓盤的反射頻譜只有兩個較明顯的共振波段，然而週期性排列之銀奈米圓盤其反射頻譜卻有其他的共振波段存在，表示週期性排列之銀奈米圓盤有重要的耦合效應。Regularly patterned Ag nanoparticles (NPs) on the surfaces of an InGaN/GaN quantum well (QW) and two QW light-emitting diode (LED) samples are fabricated for inducing localized surface plasmon (LSP) coupling with the QWs based on the nano-imprint lithography technique. From the temperature-dependent photoluminescence (PL) measurements, we observe the shifting of the QW emission wavelength toward the LSP resonance wavelength, the enhancement of PL emission intensity, and the increase of QW internal quantum efficiency. By coating an SiO2 layer on the Ag NPs for protecting the NPs, the LSP resonance wavelength is red-shifted by ~20 nm. To match the QW emission wavelength and the LSP resonance wavelength, we need to make the Ag NPs smaller for maximizing the LSP coupling strength. Besides, the fabrication and characterization of connected Ag nanodisks in GaN for understanding their surface plasmon resonance behaviors are demonstrated. Regularly patterned Ag nanodisks based on the nano-imprint lithography technique and randomly patterned Ag nanodisks based on the nanosphere lithography technique are fabricated for comparison, particularly for understanding the factor of the periodical pattern. In the randomly patterned samples, only two broad dips, which indicate the SP resonance wavelengths, are observed in the reflection spectra. Howevr, in the regularly patterned samples, other dips are observed, indicating the important effects of the periodical pattern. When the thickness of the Ag nanodisks is increased, the SP resonance features are red shifted.5242342 bytesapplication/pdfen-US金屬奈米結構表面電漿子量子井Surface PlasmonMetal NanostructuresQuantum Wellsthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/253437/1/ntu-101-R99941099-1.pdf