Fabrication of optical waveguide devices using electromagnetic assisted nanoimprinting

Weng, Y.-J.Y.-J.WengWeng, Y.-C.Y.-C.WengWong, Y.-C.Y.-C.WongYang, S.-Y.S.-Y.YangLiu, H.-K.H.-K.LiuSEN-YEU YANG2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/448170[SDGs]SDG9Fabrication of optical waveguide devices using electromagnetic assisted nanoimprintingconference paper10.1109/ICSPS.2009.1792-s2.0-70449650461https://www.scopus.com/inward/record.uri?eid=2-s2.0-70449650461&doi=10.1109%2fICSPS.2009.179&partnerID=40&md5=5a2ac688add6a251b299bf63c6d78387