Extraction of Frequency Dependent Macromodels for MEMS Squeeze-film Damping Effects

Yang, Y.-J.Y.-J.YangChien, C.-M.C.-M.ChienKamon, M.M.KamonRabinovich, V. L.V. L.RabinovichGilbert, J. R.J. R.Gilbert2011-02-112018-06-282011-02-112018-06-282005-01http://ntur.lib.ntu.edu.tw//handle/246246/222212en-USExtraction of Frequency Dependent Macromodels for MEMS Squeeze-film Damping Effectsjournal article