Chu, J.P.J.P.ChuHsiung, G.-Y.G.-Y.HsiungHuang, W.W.HuangLuo, M.-F.M.-F.LuoChiu, Y.-P.Y.-P.ChiuHorng, R.-H.R.-H.HorngHasegawa, S.S.HasegawaChia-Ching Chang2019-12-272019-12-27201501694332https://scholars.lib.ntu.edu.tw/handle/123456789/443106https://www.scopus.com/inward/record.uri?eid=2-s2.0-84944199938&doi=10.1016%2fj.apsusc.2015.09.046&partnerID=40&md5=403b6520cae3b9aa6e8002bcfaa8dff6Preface: 7th vacuum and surface sciences conference of Asia and Australia (VASSCAA-7)other10.1016/j.apsusc.2015.09.0462-s2.0-84944199938WOS:000363672100001https://www.scopus.com/inward/record.uri?eid=2-s2.0-84944199938&doi=10.1016%2fj.apsusc.2015.09.046&partnerID=40&md5=403b6520cae3b9aa6e8002bcfaa8dff6