Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pulling

Liu, J.-R.J.-R.LiuLi, W.-C.W.-C.LiWEI-CHANG LI2021-02-042021-02-042020https://www.scopus.com/inward/record.url?eid=2-s2.0-85081091904&partnerID=40&md5=3f36c826a26368074c866327baa8e1d2https://scholars.lib.ntu.edu.tw/handle/123456789/546891[SDGs]SDG7[SDGs]SDG9Temperature-compensated CMOS-MEMS resonators via electrical stiffness frequency pullingjournal article10.1088/1361-6439/ab50ef2-s2.0-85081091904WOS:000499887700001