A study of the use of the planar encoder system for the geometric error tests of CNC machine tools

Jywe W.-Y.Shyu L.-H.Lee K.-C.Wen-Yuh Jywe2022-05-242022-05-242002https://www.scopus.com/inward/record.uri?eid=2-s2.0-0141655265&partnerID=40&md5=cb782a722e6ddebefcd4a3abf0e10a9ahttps://scholars.lib.ntu.edu.tw/handle/123456789/612006In this paper, a new product for a semi-conductor manufacturing device, a planar encoder system, is introduced for geometric error test of a CNC machine tool. The principle of the application is described. For the geometric error test, 12 specified test paths are provided to calibrate the 21 error components. Selection of test path is possible for identified error component.CalibrationContour measurementElectrooptical devicesInterferometersMeasurement errorsSensorsGeometric error testsPlanar encoder systemMachine toolsA study of the use of the planar encoder system for the geometric error tests of CNC machine toolsconference paper2-s2.0-0141655265