國立臺灣大學機械工程學系Pai, Wei-MingWei-MingPaiChen, Dar-ZenDar-ZenChenLee, Jyh-JoneJyh-JoneLeeWu, Tzong-MingTzong-MingWu2006-09-282018-06-282006-09-282018-06-282003-08-21http://ntur.lib.ntu.edu.tw//handle/246246/20060927120047398753This paper presents an efficient and systematic methodology for the conceptual design of planar retainer mechanism. The mechanism is used to hold wafers in a wafer container and prevent wafers from collision and scrape during transportation. At the request of high cleanliness, the mechanism is required to have least frictional motion to avoid generating particles inside the wafer container. These conceptual functions of retainer mechanism are embodied as functional requirements for the motions of mechanism’s key links. From the functional requirements, it is possible to construct the admissible key-links chain. The key-links chain is then assigned into feasible graphs existing in the atlas. In addition to the key-links chain in the feasible graphs, the remaining links and joints confining the mechanism motion to the specific mobility and nature of motion can be identified. Admissible retainer mechanisms can be finally obtained by assigning appropriate specifications of the remaining joints.application/pdf197269 bytesapplication/pdfzh-TWRetainer mechanismSMIFWafer containerthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/20060927120047398753/1/0031.pdf