Synthesis and characterization of fluorinated aminoalkoxide and iminoalkoxide gallium complexes: Application in chemical vapor deposition of Ga2O3 thin films

Chi, Y.Y.ChiChou, T.-Y.T.-Y.ChouWang, Y.-J.Y.-J.WangHuang, S.-F.S.-F.HuangCarty, A.J.A.J.CartyScoles, L.L.ScolesUdachin, K.A.K.A.UdachinSHIE-MING PENGLee, G.-H.G.-H.Lee2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-1642577277&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/308155[SDGs]SDG6Synthesis and characterization of fluorinated aminoalkoxide and iminoalkoxide gallium complexes: Application in chemical vapor deposition of Ga2O3 thin filmsjournal article10.1021/om034148d2-s2.0-1642577277WOS:000187727600017