Chen, Ting-YiTing-YiChenTsai, Chun-PuChun-PuTsaiWEI-CHANG LI2024-07-032024-07-032023-01-019784886864352https://www.scopus.com/record/display.uri?eid=2-s2.0-85193503667&origin=resultslisthttps://scholars.lib.ntu.edu.tw/handle/123456789/719594This work demonstrates for the first time a micromechanical event triggered/recorded sensor using internal resonance (IR) induced frequency combs at the output as an indicator to monitor a particular changing sequence for the physical parameter to be sensed. Particularly, based on an in-plane flexural mode beam resonator with a 1:5 IR region purposely aligned with the bifurcating attractor branches, IR can be triggered when the device driven at a fixed driving frequency has gone through a particular sequence of temperature. The event triggered sensor, similar to regular electrical triggers with hysteresis, presents frequency combs at the output (as bit "1") for the temperature rising across 30°C and retains combs even when the temperature reduces below 30°C. Until the temperature decreases below 24°C (as bit "0"), frequency combs then disappear. This technique imparts some sort of intelligence into the device and makes them useful for event recording/monitoring sensor applications.falsebifurcating attractor branchesEvent triggered sensorfrequency combsinternal resonancenonlinear resonatorconference paper2-s2.0-85193503667