Investigation of the wear of the pad conditioner in chemical mechanical polishing process

Liao, Y.S.Y.S.LiaoYang, C.T.C.T.YangYUNN-SHIUAN LIAO2020-01-132020-01-132009https://scholars.lib.ntu.edu.tw/handle/123456789/448648Investigation of the wear of the pad conditioner in chemical mechanical polishing processconference paper10.4028/www.scientific.net/AMR.76-78.1952-s2.0-73949086071https://www.scopus.com/inward/record.uri?eid=2-s2.0-73949086071&doi=10.4028%2fwww.scientific.net%2fAMR.76-78.195&partnerID=40&md5=000301e999deed1a68ad0b9d59b16c06