A method integrating optimal algorithm and FEM on CMOS residual stress

Chuang, W.C.W.C.ChuangLin, D.T.W.D.T.W.LinHu, Y.-C.Y.-C.HuLee, H.-L.H.-L.LeeCheng, C.-H.C.-H.ChengChang, P.-Z.P.-Z.ChangQuyen, N.B.N.B.QuyenPEI-ZEN CHANG2020-04-282020-04-282014https://scholars.lib.ntu.edu.tw/handle/123456789/486813A method integrating optimal algorithm and FEM on CMOS residual stressjournal article10.1017/jmech.2013.512-s2.0-84898413395https://www.scopus.com/inward/record.uri?eid=2-s2.0-84898413395&doi=10.1017%2fjmech.2013.51&partnerID=40&md5=d6e60fb2255688a682b8771f093e1ee8