Structural and compositional investigation of yttrium-doped HfO<inf>2</inf> films epitaxially grown on Si (111)

Yang, Z.K.Z.K.YangLee, W.C.W.C.LeeLee, Y.J.Y.J.LeeChang, P.P.ChangHuang, M.L.M.L.HuangMINGHWEI HONGYu, K.L.K.L.YuTang, M.-T.M.-T.TangLin, B.-H.B.-H.LinHsu, C.-H.C.-H.HsuKwo, J.J.Kwo2019-12-272019-12-272007https://scholars.lib.ntu.edu.tw/handle/123456789/443434Structural and compositional investigation of yttrium-doped HfO<inf>2</inf> films epitaxially grown on Si (111)journal article10.1063/1.28161212-s2.0-36249001075https://www.scopus.com/inward/record.uri?eid=2-s2.0-36249001075&doi=10.1063%2f1.2816121&partnerID=40&md5=c2320f31f01cd50a97a8ac888dca6bcc