Direct impurity analysis of semiconductor photoresist samples with laser ablation ICP-MS

Chi, P.-H.P.-H.ChiKo, F.-H.F.-H.KoHsu, C.-T.C.-T.HsuChen, H.-L.H.-L.ChenYang, C.-K.C.-K.YangSun, Y.-C.Y.-C.SunYang, M.-H.M.-H.YangHSUEN-LI CHEN2020-05-122020-05-122002https://scholars.lib.ntu.edu.tw/handle/123456789/491389Direct impurity analysis of semiconductor photoresist samples with laser ablation ICP-MSjournal article10.1039/b110070j2-s2.0-0036010485https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036010485&doi=10.1039%2fb110070j&partnerID=40&md5=32960bdbca5f7c1a2a01250ae2cd3e3b