Improvement in oxide thickness uniformity by repeated spike oxidation

Hong, C.-C.C.-C.HongLee, C.-Y.C.-Y.LeeHsieh, Y.-L.Y.-L.HsiehLiu, C.-C.C.-C.LiuFong, I.-K.I.-K.FongHwu, J.-G.J.-G.HwuJENN-GWO HWU2018-09-102018-09-102001http://www.scopus.com/inward/record.url?eid=2-s2.0-0035423123&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/292415Improvement in oxide thickness uniformity by repeated spike oxidationjournal article10.1109/66.939819