Printing 65nm Dense Lines by Using Phase Masks at 157nm Wavelength

L. A. WangW. C. ChengLON A. WANG2018-09-102018-09-102002-01http://scholars.lib.ntu.edu.tw/handle/123456789/299272AntwerpPrinting 65nm Dense Lines by Using Phase Masks at 157nm Wavelengthconference paper