A Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structures

Yang, Y.-J.Y.-J.YangFan, K.-C.K.-C.FanKuo, W.-C.W.-C.Kuo2010-10-192018-06-282010-10-192018-06-282006-01http://ntur.lib.ntu.edu.tw//handle/246246/217251en-USA Single-run Single-mask ICP-RIE Process for Fabricating Suspended High-Aspect-Ratio MEMS Structuresjournal article