Uncoupling micromachined-based piezoelectric accelerometer performance from a sensor structure transfer function

Hsu, Yu-HsiangYu-HsiangHsuLee, Chih-KungChih-KungLeeHuang, Long-SunLong-SunHuangChu, Chih-ChengChih-ChengChuYU-HSIANG HSUCHIH-KUNG LEECHIN-CHOU CHU2009-01-212018-06-292009-01-212018-06-292005-06http://ntur.lib.ntu.edu.tw//handle/246246/107116application/pdf182459 bytesapplication/pdfen-USUncoupling micromachined-based piezoelectric accelerometer performance from a sensor structure transfer function10.1109/TMECH.2005.8483012-s2.0-23044456290WOS:000230212700010http://ntur.lib.ntu.edu.tw/bitstream/246246/107116/1/10.pdf