Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolution

范光照林器躉李瑞君陳亮嘉Yuri Chugui2021-03-292021-03-2920170257-9731https://www.AiritiLibrary.com/Publication/Index/02579731-201706-201708220008-201708220008-253-260https://scholars.lib.ntu.edu.tw/handle/123456789/555644Focus Probe Technique for Edge Detection and Linewidth Measurement of Microstructures with Nanometer Resolutionjournal article