Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators

Hah, D.D.HahHuang, S.T.-Y.S.T.-Y.HuangTsai, J.-C.J.-C.TsaiToshiyoshi, H.H.ToshiyoshiWu, M.C.M.C.WuJUI-CHE TSAI2018-09-102018-09-102004http://www.scopus.com/inward/record.url?eid=2-s2.0-1942500864&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/309158Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuatorsjournal article10.1109/JMEMS.2004.825314