An Efficiency Scanning Strategy Based on Online Smoothing Variable-Speed for AFM with a Rotating Stage

Huang-Chih ChenSheng-Wei PengTing-An ChouLi-Chen Fu2024-10-182024-10-182024-07-10https://scholars.lib.ntu.edu.tw/handle/123456789/722193[SDGs]SDG7An Efficiency Scanning Strategy Based on Online Smoothing Variable-Speed for AFM with a Rotating Stageconference paper10.23919/acc60939.2024.10644777