Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenches

CHEN, PHPHCHENYAU, CCYAUWU, KYKYWUet al.PING-HEI CHEN2018-09-102018-09-102005http://scholars.lib.ntu.edu.tw/handle/123456789/314912Application of the Taguchi's design of experiments to optimize a bromine chemistry-based etching recipe for deep silicon trenchesjournal article10.1016/j.mee.2004.09.001