Comparison of model and experiment for Ar, Ar/O<inf>2</inf> and Ar/O <inf>2</inf>/Cl<inf>2</inf> inductively coupled plasmas

Hsu, C.-C.C.-C.HsuNierode, M.A.M.A.NierodeCoburn, J.W.J.W.CoburnGraves, D.B.D.B.GravesJERRY CHENG-CHE HSU2020-01-062020-01-062006https://scholars.lib.ntu.edu.tw/handle/123456789/445422Comparison of model and experiment for Ar, Ar/O<inf>2</inf> and Ar/O <inf>2</inf>/Cl<inf>2</inf> inductively coupled plasmasjournal article10.1088/0022-3727/39/15/0092-s2.0-33746471207https://www.scopus.com/inward/record.uri?eid=2-s2.0-33746471207&doi=10.1088%2f0022-3727%2f39%2f15%2f009&partnerID=40&md5=7f3507c82077ebc22f51b1824cd1db1c