P-type doping in GaN through Be implantation

Feng, Z. C.Z. C.FengSun, Y. J.Y. J.SunTan, L. S.L. S.TanChua, S. J.S. J.ChuaYu, J. W.J. W.YuYang, C. C.C. C.YangLu, W.W.LuCollins, W. E.W. E.Collins2009-03-112018-07-062009-03-112018-07-062005http://ntur.lib.ntu.edu.tw//handle/246246/144176application/pdf267106 bytesapplication/pdfen-USP-type doping in GaN through Be implantationjournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/144176/3/905.pdf