Shih, H.-Y.H.-Y.ShihLin, M.-C.M.-C.LinChen, L.-Y.L.-Y.ChenChen, M.-J.M.-J.ChenMIIN-JANG CHEN2020-05-122020-05-122015https://scholars.lib.ntu.edu.tw/handle/123456789/491749Uniform GaN thin films grown on (100) silicon by remote plasma atomic layer depositionjournal article10.1088/0957-4484/26/1/0140022-s2.0-84916908636https://www.scopus.com/inward/record.uri?eid=2-s2.0-84916908636&doi=10.1088%2f0957-4484%2f26%2f1%2f014002&partnerID=40&md5=a362965ccd60dee4202c7b0a89014ee1