Silicon waveguide sidewall smoothing by KrF excimer laser reformation

Hung, S.-C.S.-C.HungLiang, E.-Z.E.-Z.LiangCHING-FUH LIN2018-09-102018-09-102009http://www.scopus.com/inward/record.url?eid=2-s2.0-65749101958&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350126Silicon waveguide sidewall smoothing by KrF excimer laser reformationjournal article10.1109/JLT.2008.923240