Optimizing CFET Parasitic Capacitance and Performance Through Middle Dielectric Isolation and Middle via Integration

Wu, Meng-LinMeng-LinWuLu, Yu-ChengYu-ChengLuVITA PI-HO HU2025-10-272025-10-272025-06-08https://scholars.lib.ntu.edu.tw/handle/123456789/732988Optimizing CFET Parasitic Capacitance and Performance Through Middle Dielectric Isolation and Middle via Integrationconference paper10.23919/snw65111.2025.11097213