Localized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystals

Lin, Gong-RuGong-RuLinLin, Chun-JungChun-JungLinChou, Li-JenLi-JenChouChueh, Yu-LunYu-LunChuehLinGongRu2009-03-252018-07-062009-03-252018-07-062006http://ntur.lib.ntu.edu.tw//handle/246246/148009en-USLocalized CO2 laser annealing induced dehydrogenation/ablation and optical refinement of silicon-rich silicon dioxide film with embedded Si nanocrystalsjournal article