The retardation of aluminum-amorphous silicon interaction by phosphine plasma treatment

Wei, J.-H.J.-H.WeiSI-CHEN LEE2020-06-112020-06-111998https://scholars.lib.ntu.edu.tw/handle/123456789/498862The retardation of aluminum-amorphous silicon interaction by phosphine plasma treatmentjournal article10.1116/1.5810742-s2.0-0032375674https://www.scopus.com/inward/record.uri?eid=2-s2.0-0032375674&doi=10.1116%2f1.581074&partnerID=40&md5=d26f2adb8ceb97f08e9cb7179f1f1940