Optical scanners realized by surface-micromachined vertical torsion mirror

Su, G.-D.J.G.-D.J.SuLee, S.-S.S.-S.LeeWu, M.C.M.C.WuGUO-DUNG JOHN SU2018-09-102018-09-101999http://www.scopus.com/inward/record.url?eid=2-s2.0-0032682334&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/350032[SDGs]SDG7Optical scanners realized by surface-micromachined vertical torsion mirrorjournal article10.1109/68.759407