Multiple patterning layout decomposition considering complex coloring rules and density balancing

Iris Hui-Ru JiangHua-Yu ChangHUI-RU JIANG2019-07-112019-07-1120172780070https://scholars.lib.ntu.edu.tw/handle/123456789/413384Multiple patterning layout decomposition considering complex coloring rules and density balancingjournal article10.1109/tcad.2017.26810682-s2.0-85021655081