Polysilicon-filled carbon nanotube grass structural material for micromechanical resonators

Li, W.-C.W.-C.LiJiang, Y.Y.JiangSchneider, R.A.R.A.SchneiderBarrow, H.G.H.G.BarrowLin, L.L.LinNguyen, C.T.C.C.T.C.NguyenWEI-CHANG LI2020-04-282020-04-282011https://scholars.lib.ntu.edu.tw/handle/123456789/486408Polysilicon-filled carbon nanotube grass structural material for micromechanical resonatorsconference paper10.1109/MEMSYS.2011.57344652-s2.0-79953771965https://www.scopus.com/inward/record.uri?eid=2-s2.0-79953771965&doi=10.1109%2fMEMSYS.2011.5734465&partnerID=40&md5=578ac33b1ad6ce5a4faab95d52963043