Wang J.-M.Lin H.-H.Lin Y.-J.Ou Y.-C.Yang L.-J.Lin C.-W.Yang Y.-J.YAO-JOE YANG2019-07-152019-07-1520069.78142E+12https://www.scopus.com/inward/record.uri?eid=2-s2.0-46149087773&doi=10.1109%2fNEMS.2006.334555&partnerID=40&md5=270290a0bc7e8a11b08246bacdce2b9dhttps://scholars.lib.ntu.edu.tw/handle/123456789/413781Design and fabrication of a diaphragm type thermo-buckled microactuatorsconference paper10.1109/NEMS.2006.3345552-s2.0-46149087773