Interfacial layer reduction and high permittivity tetragonal ZrO 2 on germanium reaching ultrathin 0.39 nm equivalent oxide thickness

CHEE-WEE LIULin, C.-M.C.-M.LinChang, H.-C.H.-C.ChangWong, I.-H.I.-H.WongLuo, S.-J.S.-J.LuoLiu, C.W.C.W.LiuHu, C.C.HuCHEE-WEE LIU2018-09-102018-09-102013http://www.scopus.com/inward/record.url?eid=2-s2.0-84879073821&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/380228Interfacial layer reduction and high permittivity tetragonal ZrO 2 on germanium reaching ultrathin 0.39 nm equivalent oxide thicknessjournal article10.1063/1.4810934