Fabrication and simulation of large-scale MEMS deformable mirror for wave front active control

Lin, P.-Y.P.-Y.LinHsieh, H.-T.H.-T.HsiehGUO-DUNG JOHN SU2018-09-102018-09-102010http://www.scopus.com/inward/record.url?eid=2-s2.0-77957986288&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/357869Fabrication and simulation of large-scale MEMS deformable mirror for wave front active controlconference paper10.1117/12.861097