Fabrication of well-aligned and mono-modal germanium dots on the silicon substrate with trench-ridge nano-structures

CHIEH-HSIUNG KUANChen, Y.-R.Y.-R.ChenPeng, Y.H.Y.H.PengKuan, C.H.C.H.KuanChen, P.S.P.S.ChenCHIEH-HSIUNG KUAN2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-32144454895&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/316319Fabrication of well-aligned and mono-modal germanium dots on the silicon substrate with trench-ridge nano-structuresconference paper