A thermal sensor and switch based on a plasma polymer/ZnO suspended nanobelt bimorph structure

He, Jr-HauJr-HauHeSingamaneni, SrikanthSrikanthSingamaneniHo, Chih H.Chih H.HoLin, Yen-HsiYen-HsiLinMcConney, Michael E.Michael E.McConneyTsukruk, Vladimir V.Vladimir V.Tsukruk2009-03-112018-07-062009-03-112018-07-062009http://ntur.lib.ntu.edu.tw//handle/246246/144163application/pdf1221696 bytesapplication/pdfen-USA thermal sensor and switch based on a plasma polymer/ZnO suspended nanobelt bimorph structurejournal articlehttp://ntur.lib.ntu.edu.tw/bitstream/246246/144163/1/07.pdf