李嗣涔臺灣大學：電子工程學研究所莊子弘Chuang, Tzu-HungTzu-HungChuang2007-11-272018-07-102007-11-272018-07-102006http://ntur.lib.ntu.edu.tw//handle/246246/57619本文在理論及實驗上計算並量測出在週期排列的金屬孔洞上，其表面電漿子的能帶圖，且經由量測在正方形陣列中不同大小孔洞的異常穿透現象，觀察表面電漿子在布拉格散射下產生的不同表面電荷場強度。而藉由在不同長寬比的長方形孔洞下所量測的能帶圖，可顯示出局部表面電漿子的交互作用及其機制。另外，在量子點紅外線偵測元件的背面加上一層週期排列的金屬孔洞即可窄化其可偵測之區域。本文亦提到在銀/二氧化矽/矽的結構中可發現遠距耦合的表面電漿子，並且其耦合長度也被量測並計算出來。更進一步地，經由加熱一個適當設計的結構，利用表面電漿子的特性可製作出窄頻寬且高功率的紅外線發光元件，此結構為在矽基版上鍍上銀/二氧化矽/銀，而最上層的銀挖上週期排列的孔洞。而在此元件中，亦可觀察到上述的遠距耦合表面電漿子。The band diagram of surface plasmons (SPs) on a periodic array of metal holes is investigated in theory and experiment. The extraordinary transmission of various sized holes in a squared array is measured to observe the different surface charge fields under the Bragg scattering of SPs. The dispersion relations of different aspect length to width ratio of rectangular holes are studied to show the interaction among local SPs and its mechanism. Furthermore, a periodic array of metal holes fabricated on the back of a quantum dot infrared photodetector is illustrated to narrow the detecting region of the photodetector. Besides, a remotely coupled surface plasmon (RCSP) is discovered in an Ag/SiO2/Si structure, and the coupling length is determined as well. In addition, a narrow bandwidth and high power infrared emitter are invented by heating the triple layer structure which consists of an SiO2 layer between two Ag films on a Si substrate. The top Ag layer is perforated by periodic holes. Finally, the features of RCSPs are still observable in this plasmonic thermal emitter.Chapter 1 Introduction 01 Chapter 2 The Fundamentals of Surface Plasmons and Infrared Detectors 5 2.1 The Fundamentals of Surface Plasmons 5 2.1.1 Surface Plasmons on Smooth Surfaces 5 2.1.2 Surface Plasmons on the surface with hole arrays 8 2.2 The Fundamentals of QDIP 13 2.2.1 Infrared Detectors 13 2.2.2 Quantum Dot Infrared Photodetectors 15 2.3 Process Flow 18 2.3.1 Fabrication Processes of Metal Hole Arrays 18 2.3.2 Fabrication Processes of QDIP 19 2.3.3 Fabrication Processes of Plasmonic Thermal Emitter 23 2.4 Measuring Systems 25 2.4.1 Introduction of FTIR 25 2.4.2 Relative Spectral Response 27 2.4.3 Thermal Emitter Chamber 29 Chapter 3 Extraordinary Transmission through a Periodic Array of Metal Holes 31 3.1 Band Diagram of SPs on Periodic Metal Holes 31 3.1.1 Theory 31 3.1.2 Experiments 34 3.2 Influence of Hole Size on SPs on Periodic Metal Holes 37 3.2.1 Experiments 37 3.2.2 Results and Discussion 40 3.3 Influence of Hole Shape on SPs on Periodic Metal Holes 44 3.3.1 Experiments 44 3.3.2 Results and Discussion 47 3.4 Quantum Dot Infrared Photodetector with Periodic Metal Holes 51 Chapter 4 Remotely Coupled Surface Plasmons and a Plasmonic Thermal Emitter 56 4.1 Remotely Coupled Surface Plasmons 57 4.1.1 Experiments 57 4.1.2 Results and Discussion 57 4.2 Plasmonic Thermal Emitter 65 4.2.1 Experiments 65 4.2.2 Results and Discussion 65 4.3 Remotely Coupled Surface Plasmons in a Plasmonic Thermal Emitter 73 4.3.1 Experiments 73 4.3.2 Results and Discussion 74 Chapter 5 Conclusions 80 Bibliography 822848223 bytesapplication/pdfen-US表面電漿子異常穿透熱輻射器遠距耦合surface plasmonsextraordinary transmissionthermal emitterremotely coupledthesishttp://ntur.lib.ntu.edu.tw/bitstream/246246/57619/1/ntu-95-R93943064-1.pdf