Thermally isolated microstructures for sensors and actuators

Inst. of Appl. Mech., National Taiwan Univ.Lin, LiweiLiweiLinChiao, MuMuChiaoChu, Huey-ChiHuey-ChiChu2007-04-192018-06-292007-04-192018-06-291995-10http://ntur.lib.ntu.edu.tw//handle/246246/2007041910032095application/pdf695302 bytesapplication/pdfen-USThermally isolated microstructures for sensors and actuatorsother10.1109/MHS.1995.494222http://ntur.lib.ntu.edu.tw/bitstream/246246/2007041910032095/1/00494222.pdf