Method of Forming a Nanotip Array in a Substrate by Forming Masks on Portions of the Substrate and Etching the Unmasked Portions

K. H. ChenJ. S. HwangH. C. LoD. DasL. C. Chen2020-06-202020-06-202005https://scholars.lib.ntu.edu.tw/handle/123456789/50388821-MayMethod of Forming a Nanotip Array in a Substrate by Forming Masks on Portions of the Substrate and Etching the Unmasked Portionspatent