Manufacturability analysis of a micro-electro-mechanical systems–based electron-optical system design for direct-write lithography

Sheng-Yung ChenShin-Chuan ChenHsing-Hong ChenKuen-Yu TsaiHsin-Hung PanKUEN-YU TSAI2018-09-102018-09-102010-06http://scholars.lib.ntu.edu.tw/handle/123456789/359305Manufacturability analysis of a micro-electro-mechanical systems–based electron-optical system design for direct-write lithographyjournal article10.1143/JJAP.49.06GE052-s2.0-77955335105WOS:000278966300020