AFM probe controller design based on μ-synthesis

Lan, K.-J.K.-J.LanYen, J.-Y.J.-Y.YenLee, C.-K.C.-K.LeeLin, Y.-M.Y.-M.LinChen, C.-H.C.-H.ChenJIA-YUSH YEN2018-09-102018-09-102005http://www.scopus.com/inward/record.url?eid=2-s2.0-17244382994&partnerID=MN8TOARShttp://scholars.lib.ntu.edu.tw/handle/123456789/314158AFM probe controller design based on μ-synthesisjournal article2-s2.0-17244382994