CMOS-MEMS test-key for extracting wafer-level mechanical properties

Chuang, W.-C.W.-C.ChuangHu, Y.-C.Y.-C.HuChang, P.-Z.P.-Z.ChangPEI-ZEN CHANG2020-04-282020-04-282012https://scholars.lib.ntu.edu.tw/handle/123456789/486821CMOS-MEMS test-key for extracting wafer-level mechanical propertiesjournal article10.3390/s1212170942-s2.0-84871677168https://www.scopus.com/inward/record.uri?eid=2-s2.0-84871677168&doi=10.3390%2fs121217094&partnerID=40&md5=a49933259fd7d4fefb4b8aebd3af769b