Nanostructured and mechanical properties of high-entropy alloy nitride films prepared by magnetron sputtering at different substrate temperatures

Chang, C.H.C.H.ChangLi, P.W.P.W.LiWu, Q.Q.Q.Q.WuWang, M.H.M.H.WangSung, C.C.C.C.SungHsu, C.-Y.C.-Y.HsuCHIA-CHI SUNG2020-01-172020-01-172019https://scholars.lib.ntu.edu.tw/handle/123456789/451092Nanostructured and mechanical properties of high-entropy alloy nitride films prepared by magnetron sputtering at different substrate temperaturesjournal article10.1080/10667857.2018.15574112-s2.0-85058857021https://www.scopus.com/inward/record.uri?eid=2-s2.0-85058857021&doi=10.1080%2f10667857.2018.1557411&partnerID=40&md5=1e13b6f7561c37c949a8787b5463c3cd