Using higher steps phase-shifting algorithms and linear least-squares fitting in white-light scanning interferometry

Shen, Ming-HsingMing-HsingShenHwang, Chi-HungChi-HungHwangWEICHUNG WANG2019-10-282019-10-2820150143-8166https://scholars.lib.ntu.edu.tw/handle/123456789/428596Using higher steps phase-shifting algorithms and linear least-squares fitting in white-light scanning interferometryjournal article10.1016/j.optlaseng.2014.09.004WOS:000347020700023