Self-aligned Top-gate Coplanar In-Ga-Zn-O Thin Film Transistors

Wu, Cheng-HanCheng-HanWuHsieh, Hsing-HungHsing-HungHsiehChien, Chih-WeiChih-WeiChienWu, Chung-ChihChung-ChihWu2011-11-232018-07-052011-11-232018-07-052009http://ntur.lib.ntu.edu.tw//handle/246246/237962http://ntur.lib.ntu.edu.tw/bitstream/246246/237962/-1/06.pdfen-USSelf-aligned Top-gate Coplanar In-Ga-Zn-O Thin Film Transistorsjournal article10.1109/JDT.2009.20261892-s2.0-70450211244WOS:000271846800004http://ntur.lib.ntu.edu.tw/bitstream/246246/237962/-1/06.pdf